Title :
Ionic plasmas in room-temperature atmospheric-pressure gases
Author :
Sakai, O. ; Yamada, K. ; Urabe, K.
Author_Institution :
Department of Electronic Science and Engineering, Kyoto University, Kyoto-daigaku Katsura, Nishikyo-ku, 615-8510, Japan
Abstract :
Summary form only given. Ionic plasmas or negative ion plasmas, which have been observed in negative ion sources and in dry etching reactors with fluorinated gases, includes different transport processes from conventional plasmas composed of positive ions and electrons.1–3In comparison with the previous studies, we predict and examine ionic plasmas at atmospheric pressure in the gases very similar to the ambient air, in which electrons should almost diminish and ions suffer from heavy collisions against neutral atoms and molecules.
Keywords :
Atmospheric modeling; Dielectric constant; Gases; Ion sources; Plasmas; Tensile stress;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383304