A built-in self repairable RF MEMS filter using redundant structures

This paper demonstrates a tunable RF filter design that can ldquoself-repairrdquo when the MEMS switch used for tuning the filter fails. The filter is designed so that symmetry exists at the segment where MEMS switch is placed. Redundant structures and MEMS switch are then added to the other side of the symmetry. These redundant structures will be used when the original MEMS switch fails. Minor design changes to the filter, such as varying the length of filter line segment at the redundant end, is shown to produce a more similar response to the unflawed filter.