Dual sided Al/Al2O3 microchannel plasma ozone reactor

Summary form only given. Arrays of low temperature microchannel plasmas have been demonstrated to be an efficient generator of ozone in an atmospheric pressure environment.¹ An on-chip chemical reactor was fabricated from Al foil by a sequence of electrochemical processes and micropowder abrasion techniques. Having a thickness of ∼ 1 mm, arrays of parallel microchannels can be stacked to yield increasing throughput. The Al/Al2O3 structure chosen for the reactor renders it well-suited for demanding operating conditions and for use with attaching and corrosive gases and vapors, in particular.