Dissociation and conversion of carbon dioxide in arrays of atmospheric pressure microplasma devices

Summary form only given. A scalable microplasma reactor designed specifically for the dissociation of CO2 and other feedstock gases has been demonstrated. An array of linear microchannels, having a width and depth of ∼100 µm, and ∼200 µm, respectively, were fabricated in a 400 µm thick glass substrate by a combination of chemical and micropowder ablation techniques. Electrodes were deposited on both sides of the substrates and the electrodes were etched to produce a spatially-varying profile for selectively generating microplasma along the chemical reaction pathway.