Design of thermal dual-mass MEMS gyroscope with 2-DoF drive mode oscillator

This paper presents a design of thermally actuated dual mass MEMS gyroscope with 2-DoF drive mode oscillator. A complete process based simulation of the proposed design following design rules of commercially available low cost standard MEMS process; MetalMUMPs is included in this paper. Properties of electroplated Nickel are incorporated while modeling and simulations of proposed device. Complete modal analysis as well as dynamic transient analysis is carried out to verify design parameters of the device. Simulations indicate drive amplitude of 5.5 mum at 0.5 Vac making chevron an efficient actuator for gyroscopes instead of traditional electrostatic actuators. Active-passive mass configuration is used to achieve mechanical amplification of the sensing mass drive-mode amplitude increasing the sensitivity of the device. This configuration scheme also helped to achieve a wide bandwidth of 2.11 kHz to enhance our device robustness against structural parameters variations.