Properties of T and H forms of DC glow oxygen discharge sustained at medium pressures up to 1000 Pa

Summary form only given. The DC glow discharge in oxygen and its mixtures can be utilized in many applications (e.g. plasma etching, sterilization, thin layer deposition or treatment). Oxygen plasma is therefore subject of both numerical and experimental studies. One of the important discharge parameters is the kinetic temperature of the neutral particles which often governs rate constants of various processes such as dissociation or diffusion. Considering the case of oxygen, the kinetic temperature can be simply obtained by its comparison with rotational temperature Trot determined from emission spectra of the oxygen molecule¹.