• DocumentCode
    2554360
  • Title

    Phenomenological description of a symmetry breaking rotating instability in HPPMS discharges

  • Author

    Gallian, Sara ; Eremin, Denis ; Mussenbrock, Thomas ; Brinkmann, Ralf Peter ; Hecimovic, Ante ; de los Arcos, Teresa ; Schulz-von der Gathen, Volker ; Boke, Marc ; Winter, Jorg ; Hitchon, William N.G.

  • Author_Institution
    Ruhr University Bochum, D-44780, Germany
  • fYear
    2012
  • fDate
    8-13 July 2012
  • Abstract
    Summary form only given. High Power Pulsed Magnetron Sputtering (HPPMS) is a recently developed Ionized Physical Vapor Deposition (IPVD) technique. A bias voltage is applied to the target for a few hundred microseconds with a frequency of a few hundreds of Hertz, delivering several kW cm−2 of power to the target. This results in the production of an ultra dense plasma with a high ionization degree, showing some peculiar behaviors.
  • Keywords
    Chemical vapor deposition; Discharges (electric); Educational institutions; Equations; Plasmas; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
  • Conference_Location
    Edinburgh
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4577-2127-4
  • Electronic_ISBN
    0730-9244
  • Type

    conf

  • DOI
    10.1109/PLASMA.2012.6383360
  • Filename
    6383360
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2554360