DocumentCode
2554374
Title
Influence of non-confined electrons at the boundaries in a HPPMS discharge - limit to gyro-average validity
Author
Gallian, Sara ; Eremin, Denis ; Mussenbrock, Thomas ; Brinkmann, Ralf Peter
Author_Institution
Ruhr University Bochum, D-44780, Germany
fYear
2012
fDate
8-13 July 2012
Abstract
Summary form only given. High Power Pulsed Magnetron Sputtering (HPPMS) is a novel Ionized Physical Vapor Deposition (IPVD) technique, able to achieve an ultra dense plasma with a high ionization degree of sputtered atoms.
Keywords
Atomic clocks; Chemical vapor deposition; Discharges (electric); Educational institutions; Ionization; Plasmas; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location
Edinburgh
ISSN
0730-9244
Print_ISBN
978-1-4577-2127-4
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2012.6383361
Filename
6383361
Link To Document