• DocumentCode
    2555136
  • Title

    Particle in cell simulations of initial Argon Dielectric Barrier Discharges

  • Author

    Huerta, Manuel A. ; Ludeking, Lars ; Woods, Andrew J.

  • Author_Institution
    University of Miami Physics Department, P. O. Box 248046, Coral gables, FL 33124, USA
  • fYear
    2012
  • fDate
    8-13 July 2012
  • Abstract
    Summary form only given. We simulate Dielectric Barrier Discharges (DBD) in Argon using a new version of the commercial particle in cell (PIC) code MAGIC. The results are an extension of the paper by Huerta and Ludeking1. The simulations are done in pure Argon at atmospheric pressure to avoid the complications that occur in air. We study DBDs with an embedded surface electrode and also with an exposed surface electrode. The only particle creation - destruction effect we consider is the ionization of Argon by electron impact. The ion drag is based on the process of charge exchange of an ion with its parent gas. The electron drag and impact ionization cross sections are based on NIST data as far as 5 keV. Above that BEB cross sections are used matched to the NIST data. Our simulations last only about several nanoseconds. We calculate the momentum imparted to the neutral gas during each time step by collisions with the ions and electrons and also the total accumulated momentum density imparted to the neutral gas during the entire simulation. This effect has been called the electro-hydrodynamic (EHD) force. The discharge is so fast that the neutral atoms have little time to move and are not able to produce secondary electrons at the dielectric surface.
  • Keywords
    Argon; Atmospheric modeling; Dielectrics; Discharges (electric); Electrodes; Semiconductor process modeling; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
  • Conference_Location
    Edinburgh
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4577-2127-4
  • Electronic_ISBN
    0730-9244
  • Type

    conf

  • DOI
    10.1109/PLASMA.2012.6383395
  • Filename
    6383395