DocumentCode
2555136
Title
Particle in cell simulations of initial Argon Dielectric Barrier Discharges
Author
Huerta, Manuel A. ; Ludeking, Lars ; Woods, Andrew J.
Author_Institution
University of Miami Physics Department, P. O. Box 248046, Coral gables, FL 33124, USA
fYear
2012
fDate
8-13 July 2012
Abstract
Summary form only given. We simulate Dielectric Barrier Discharges (DBD) in Argon using a new version of the commercial particle in cell (PIC) code MAGIC. The results are an extension of the paper by Huerta and Ludeking1. The simulations are done in pure Argon at atmospheric pressure to avoid the complications that occur in air. We study DBDs with an embedded surface electrode and also with an exposed surface electrode. The only particle creation - destruction effect we consider is the ionization of Argon by electron impact. The ion drag is based on the process of charge exchange of an ion with its parent gas. The electron drag and impact ionization cross sections are based on NIST data as far as 5 keV. Above that BEB cross sections are used matched to the NIST data. Our simulations last only about several nanoseconds. We calculate the momentum imparted to the neutral gas during each time step by collisions with the ions and electrons and also the total accumulated momentum density imparted to the neutral gas during the entire simulation. This effect has been called the electro-hydrodynamic (EHD) force. The discharge is so fast that the neutral atoms have little time to move and are not able to produce secondary electrons at the dielectric surface.
Keywords
Argon; Atmospheric modeling; Dielectrics; Discharges (electric); Electrodes; Semiconductor process modeling; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location
Edinburgh
ISSN
0730-9244
Print_ISBN
978-1-4577-2127-4
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2012.6383395
Filename
6383395
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