DocumentCode :
2555136
Title :
Particle in cell simulations of initial Argon Dielectric Barrier Discharges
Author :
Huerta, Manuel A. ; Ludeking, Lars ; Woods, Andrew J.
Author_Institution :
University of Miami Physics Department, P. O. Box 248046, Coral gables, FL 33124, USA
fYear :
2012
fDate :
8-13 July 2012
Abstract :
Summary form only given. We simulate Dielectric Barrier Discharges (DBD) in Argon using a new version of the commercial particle in cell (PIC) code MAGIC. The results are an extension of the paper by Huerta and Ludeking1. The simulations are done in pure Argon at atmospheric pressure to avoid the complications that occur in air. We study DBDs with an embedded surface electrode and also with an exposed surface electrode. The only particle creation - destruction effect we consider is the ionization of Argon by electron impact. The ion drag is based on the process of charge exchange of an ion with its parent gas. The electron drag and impact ionization cross sections are based on NIST data as far as 5 keV. Above that BEB cross sections are used matched to the NIST data. Our simulations last only about several nanoseconds. We calculate the momentum imparted to the neutral gas during each time step by collisions with the ions and electrons and also the total accumulated momentum density imparted to the neutral gas during the entire simulation. This effect has been called the electro-hydrodynamic (EHD) force. The discharge is so fast that the neutral atoms have little time to move and are not able to produce secondary electrons at the dielectric surface.
Keywords :
Argon; Atmospheric modeling; Dielectrics; Discharges (electric); Electrodes; Semiconductor process modeling; Surface treatment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
ISSN :
0730-9244
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
Type :
conf
DOI :
10.1109/PLASMA.2012.6383395
Filename :
6383395
Link To Document :
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