Title :
A compact low inductance pulse energy driver system for capillary discharge EUV laser development
Author :
Low, Kum Sang ; Cheong, Kean Phoe ; Ng, Albert ; Low, Chee Hoong ; Chia, Chin Yang ; Low, Kum Wan ; Mahadevan, David
Author_Institution :
Specscan Sdn. Bhd, No. 357C (First Floor), Jalan 5/57, 46000 Petaling Jaya, Selangor, Malaysia
Abstract :
Summary form only given. A requirement for the development of EUV (5–50 nm) laser applications is a pulse power driver system that can deliver high peak currents and fast rise-times in order to be able to pump these lasers effectively. We report here the initial results in the development of a high current driver that is efficient, compact and scalable for EUV lasers.
Keywords :
Current measurement; Discharges (electric); Electrodes; Inductance; Laser excitation; Laser theory; Pump lasers;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383440
