• DocumentCode
    2557002
  • Title

    Fabrication and characterization of SnS films deposited on different substrates by modified versition of PECVD

  • Author

    Cheng, Lili ; Liu, Minghai ; Wang, Shicai ; Wang, Manxing

  • Author_Institution
    School of Physics, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan 430074, China
  • fYear
    2012
  • fDate
    8-13 July 2012
  • Abstract
    Summary form only given. Although the fabrication of SnS films by PECVD have been reported by many researchers, there is, however, no report is available on preparation of SnS films from solid source materials using PECVD. In the present work, the SnS films were separately deposited on substrates of soda-lime glass microscope slides, FTO coated glass slides and (100)-oriented, p-type silicon slices from cost-effective and low-toxicity source materials (SnCl2·2H2O and Na2S2O3·5H2O) by novel modified version of PECVD technique. The as-growth films with grey colour were strongly adherent to substrate.
  • Keywords
    Optical diffraction; Optical films; Optical imaging; Optical pulses; Optical scattering; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
  • Conference_Location
    Edinburgh
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4577-2127-4
  • Electronic_ISBN
    0730-9244
  • Type

    conf

  • DOI
    10.1109/PLASMA.2012.6383488
  • Filename
    6383488