DocumentCode
2557002
Title
Fabrication and characterization of SnS films deposited on different substrates by modified versition of PECVD
Author
Cheng, Lili ; Liu, Minghai ; Wang, Shicai ; Wang, Manxing
Author_Institution
School of Physics, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan 430074, China
fYear
2012
fDate
8-13 July 2012
Abstract
Summary form only given. Although the fabrication of SnS films by PECVD have been reported by many researchers, there is, however, no report is available on preparation of SnS films from solid source materials using PECVD. In the present work, the SnS films were separately deposited on substrates of soda-lime glass microscope slides, FTO coated glass slides and (100)-oriented, p-type silicon slices from cost-effective and low-toxicity source materials (SnCl2 ·2H2 O and Na2 S2 O3 ·5H2 O) by novel modified version of PECVD technique. The as-growth films with grey colour were strongly adherent to substrate.
Keywords
Optical diffraction; Optical films; Optical imaging; Optical pulses; Optical scattering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location
Edinburgh
ISSN
0730-9244
Print_ISBN
978-1-4577-2127-4
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2012.6383488
Filename
6383488
Link To Document