Title :
Fabrication and characterization of SnS films deposited on different substrates by modified versition of PECVD
Author :
Cheng, Lili ; Liu, Minghai ; Wang, Shicai ; Wang, Manxing
Author_Institution :
School of Physics, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan 430074, China
Abstract :
Summary form only given. Although the fabrication of SnS films by PECVD have been reported by many researchers, there is, however, no report is available on preparation of SnS films from solid source materials using PECVD. In the present work, the SnS films were separately deposited on substrates of soda-lime glass microscope slides, FTO coated glass slides and (100)-oriented, p-type silicon slices from cost-effective and low-toxicity source materials (SnCl2·2H2O and Na2S2O3·5H2O) by novel modified version of PECVD technique. The as-growth films with grey colour were strongly adherent to substrate.
Keywords :
Optical diffraction; Optical films; Optical imaging; Optical pulses; Optical scattering; Substrates;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383488