DocumentCode
2557073
Title
C-V Measurements - And Its Implication On Oxide, Transistor And Non-volatile Memory Cell Reliability
Author
Schwalke, Udo ; Gordon, Bart
fYear
1998
fDate
15-15 Oct. 1998
Firstpage
97
Lastpage
98
Keywords
Capacitance-voltage characteristics; Current measurement; Doping; Frequency measurement; Nonvolatile memory; Quantum capacitance; Testing; Thickness measurement; Time measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 1998. IEEE International
Conference_Location
Lake Tahoe, CA, USA
Print_ISBN
0-7803-4881-8
Type
conf
DOI
10.1109/IRWS.1998.745378
Filename
745378
Link To Document