DocumentCode
2557127
Title
Equilibrium-controlled static C-V method and its applications
Author
Schwalke, Udo ; Gruensfelder, Christian ; Kerber, Martin
Author_Institution
Corp. Technol., Siemens AG, Munich, Germany
fYear
1998
fDate
12-15 Oct 1998
Firstpage
105
Lastpage
106
Abstract
In this work, we present an equilibrium-controlled static C-V technique, which takes advantage of an adaptive gate-voltage sweep. The relaxation time of the MOS system to achieve equilibrium and provides additional useful information
Keywords
MIS devices; capacitance measurement; elemental semiconductors; semiconductor device measurement; silicon; MOS system; Si; adaptive gate-voltage sweep; equilibrium; equilibrium-controlled static C-V technique; relaxation time; Capacitance-voltage characteristics; Delay effects; Feedback loop; MOS capacitors; MOSFETs; Monitoring; Temperature dependence; Temperature measurement; Time measurement; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 1998. IEEE International
Conference_Location
Lake Tahoe, CA
Print_ISBN
0-7803-4881-8
Type
conf
DOI
10.1109/IRWS.1998.745380
Filename
745380
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