Title :
Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation
Author :
Pozo, J. ; Westerveld, W. ; Harmsma, P.J. ; Yang, S. ; Bodis, P. ; Nieuwland, R. ; Lagioia, M. ; Cascio, D. M R Lo ; Staats, J. -P ; Schmits, R. ; Berg, H.V.D. ; Tabak, E. ; Green, K. ; Urbach, H.P. ; Cheng, L.K. ; Yousefi, M.
Author_Institution :
TNO, Delft, Netherlands
Abstract :
In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3×3 interferometer.
Keywords :
integrated optics; optical sensors; pressure sensors; silicon-on-insulator; strain sensors; mass production compatible sensing units; on-chip sensing; ring resonators; silicon on insulator photonic integrated sensors; Optical ring resonators; Optical sensors; Optical waveguides; Optoelectronic and photonic sensors; Photonics; Strain; 3×3 interferometer; SOI; harsh environments; on chip interrogation; photonic sensing; pressure sensor; ring resonators; silicon-on-insulator; strain sensor; ultrasound sensor;
Conference_Titel :
Transparent Optical Networks (ICTON), 2011 13th International Conference on
Conference_Location :
Stockholm
Print_ISBN :
978-1-4577-0881-7
Electronic_ISBN :
2161-2056
DOI :
10.1109/ICTON.2011.5970854
