Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation

Author

Pozo, J. ; Westerveld, W. ; Harmsma, P.J. ; Yang, S. ; Bodis, P. ; Nieuwland, R. ; Lagioia, M. ; Cascio, D. M R Lo ; Staats, J. -P ; Schmits, R. ; Berg, H.V.D. ; Tabak, E. ; Green, K. ; Urbach, H.P. ; Cheng, L.K. ; Yousefi, M.

Author_Institution

TNO, Delft, Netherlands

fYear

2011

fDate

26-30 June 2011

Firstpage

1

Lastpage

4

Abstract

In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3×3 interferometer.

Keywords

integrated optics; optical sensors; pressure sensors; silicon-on-insulator; strain sensors; mass production compatible sensing units; on-chip sensing; ring resonators; silicon on insulator photonic integrated sensors; Optical ring resonators; Optical sensors; Optical waveguides; Optoelectronic and photonic sensors; Photonics; Strain; 3×3 interferometer; SOI; harsh environments; on chip interrogation; photonic sensing; pressure sensor; ring resonators; silicon-on-insulator; strain sensor; ultrasound sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Transparent Optical Networks (ICTON), 2011 13th International Conference on

Conference_Location

Stockholm

ISSN

2161-2056

Print_ISBN

978-1-4577-0881-7

Electronic_ISBN

2161-2056

Type

conf

DOI

10.1109/ICTON.2011.5970854

Filename

5970854