DocumentCode
2558407
Title
Diagnostics and modelling for the optimization of precursor evaporation in silicon nano-particle synthesis by radiofrequency induction thermal plasmas
Author
Colombo, Vittorio ; Ghedini, Emanuele ; Gherardi, Matteo ; Sanibondi, Paolo ; Delval, C. ; Leparoux, M.
Author_Institution
Dept. of Mech. Eng. (D.I.E.M.), Univ. di Bologna, Bologna, Italy
fYear
2012
fDate
8-13 July 2012
Abstract
The evaporation of micro-sized silicon solid precursor in a laboratory scale radio-frequency induction thermal plasma system for nano-particles synthesis has been investigated with the aim of increasing the production yield of the process, which is one of the more critical issues in making this technology successful on an industrial scale [1].
Keywords
elemental semiconductors; evaporation; nanofabrication; nanoparticles; plasma materials processing; silicon; Si; diagnosis; evaporation; microsized silicon solid precursor; radio-frequency induction thermal plasmas; silicon nanoparticle; Frequency synthesizers; Laboratories; Optimization; Plasmas; Probes; Radio frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location
Edinburgh
ISSN
0730-9244
Print_ISBN
978-1-4577-2127-4
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2012.6383561
Filename
6383561
Link To Document