DocumentCode
2558581
Title
Dynamic microfluidic photomasking
Author
McKechnie, Jonathan ; Sinton, David
Author_Institution
Victoria Univ.
fYear
0
fDate
0-0 0
Firstpage
40
Lastpage
41
Abstract
This paper presents a novel microfluidic photomasking strategy. Multi-layer laminar microfluidic streaming is exploited to achieve photomasking with dynamic spatial control. Applications to microarray and photoresist patterning are investigated
Keywords
masks; micro-optics; microfluidics; optical fabrication; photoresists; microarray; microfluidic; multilayer laminar; photomasking; photoresist patterning; Fabrication; Fluid dynamics; Geometry; Lithography; Microelectromechanical systems; Microelectronics; Microfluidics; Resists; Scanning electron microscopy; Streaming media; Microfluidic Photomask; Microfluidics; Optofluidics;
fLanguage
English
Publisher
ieee
Conference_Titel
LEOS Summer Topical Meetings, 2006 Digest of the
Conference_Location
Quebec City, Que.
Print_ISBN
1-4244-0090-2
Type
conf
DOI
10.1109/LEOSST.2006.1693971
Filename
1693971
Link To Document