Title :
A novel planar magnetic sensor based on orthogonal fluxgate principle
Author :
Zorlu, O. ; Kejik, P. ; Vincent, F. ; Popovic, R.S.
Author_Institution :
Lab. de Microsyst., Ecole Polytechnique Federale de Lausanne, Switzerland
Abstract :
In this paper, we present a new planar fluxgate magnetometer structure. The sensor has the orthogonal fluxgate configuration which makes the detection part independent of the excitation mechanism. The sensor consists of a ferromagnetic cylindrical core covering an excitation rod, and planar coils for signal detection. The fabricated sensor has a linear range of ± a sensitivity of 4.3 mV/mT, and a perming below 400 nT for 200 mA peak sinusoidal excitation current at 100 kHz. The effect of demagnetization on the sensitivity, linear range, and perming for this structure is demonstrated by varying the length of the ferromagnetic core.
Keywords :
demagnetisation; ferromagnetic materials; fluxgate magnetometers; magnetic cores; magnetic sensors; 100 kHz; 200 mA; demagnetization; excitation mechanism; excitation rod; ferromagnetic cylindrical cores; orthogonal fluxgate principle; planar fluxgate magnetometer structure; planar magnetic sensor; Coils; Demagnetization; Gold; Magnetic cores; Magnetic field measurement; Magnetic materials; Magnetic sensors; Permeability; Saturation magnetization; Wire;
Conference_Titel :
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN :
0-7803-9345-7
DOI :
10.1109/RME.2005.1543048
