Controlled microstructure oxide coatings for chemical sensors

Author

Frye, G.C. ; Brinker, C.J. ; Bein, T. ; Ashley, C.S. ; Martinez, S.L.

Author_Institution

Sandia Nat. Lab., Albuquerque, NM, USA

fYear

1990

fDate

4-7 June 1990

Firstpage

61

Lastpage

64

Abstract

The use of porous oxide coatings, formed using sol-gel chemistry routes, as the discriminating elements of acoustic wave (AW) chemical sensors, is investigated. These coatings provide several unique advantages: durability, high adsorption capacity based on large surface areas, and chemical selectivity based on both molecular size and chemical interactions. The porosity of these coatings is determined by performing nitrogen adsorption isotherms using the AW device response to monitor the uptake of nitrogen at 77 K. The chemical sensitivity and selectivity obtained with this class of coatings is demonstrated using several examples: hydrous titanate ion exchange coatings, zeolite/silicate microcomposite coatings, and surface modified silicate films.<>

Keywords

chemical variables measurement; gas sensors; sol-gel processing; surface acoustic wave devices; ultrasonic transducers; 77 K; N/sub 2/; acoustic wave sensors; adsorption capacity; chemical selectivity; chemical sensors; discriminating elements; durability; ion exchange coatings; microcomposite coatings; molecular size; nitrogen adsorption isotherms; porous oxide coatings; sol-gel chemistry routes; surface areas; Acoustic waves; Chemical elements; Chemical sensors; Chemistry; Coatings; Microstructure; Monitoring; Nitrogen; Surface acoustic wave devices; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE

Conference_Location

Hilton Head Island, SC, USA

Type

conf

DOI

10.1109/SOLSEN.1990.109821

Filename

109821