ZnO thin films synthesized by chemical vapor deposition

Author

Chen, Zhuo ; Shum, Kai ; Salagaj, T. ; Zhang, Wei ; Strobl, K.

Author_Institution

Phys. Dept., City Univ. of New York, Brooklyn, NY, USA

fYear

2010

fDate

7-7 May 2010

Firstpage

1

Lastpage

6

Abstract

This paper describes the experimental results of our recent attempt to synthesize device quality ZnO thin films on silicon and sapphire substrates by means of chemical vapor deposition. The surface features and crystal quality of these films are studied by scanning electron microscope and optical spectroscopy, respectively. Although it was not successful to deposit crystalline thin film on silicon substrate, high quality thin films on sapphire substrates were synthesized.

Keywords

II-VI semiconductors; chemical vapour deposition; photoluminescence; sapphire; scanning electron microscopes; semiconductor thin films; silicon; substrates; wide band gap semiconductors; zinc compounds; Al₂O₃; Si; ZnO; ZnO thin films; chemical vapor deposition; crystalline thin film; optical spectroscopy; sapphire substrates; scanning electron microscope; silicon substrate; surface features; Chemical vapor deposition; Crystallization; Optical films; Optical microscopy; Semiconductor thin films; Silicon; Sputtering; Substrates; Thin film devices; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications and Technology Conference (LISAT), 2010 Long Island Systems

Conference_Location

Farmingdale, NY

Print_ISBN

978-1-4244-5548-5

Electronic_ISBN

978-1-4244-5550-8

Type

conf

DOI

10.1109/LISAT.2010.5478331

Filename

5478331