DocumentCode
2559702
Title
Design and fabrication of micromachined tunneling accelerometers with micro-g resolution and their comparison
Author
Patra, S. ; Bhattacharyya, Tarun Kanti
Author_Institution
Electron. & Electr. Commun. Eng. Dept., Indian Inst. of Technol., Kharagpur, India
fYear
2009
fDate
1-2 June 2009
Firstpage
1
Lastpage
4
Abstract
The paper presents implementation of several surface micromachined tunneling accelerometer structures. This work also records the study of their relative performance in order to achieve high sensitivity and high dynamic range for mu-g measurement with low cross axis sensitivity.
Keywords
accelerometers; micromachining; low cross axis sensitivity; micro-g resolution; mu-g measurement; surface micromachined tunneling accelerometer structure; Acceleration; Accelerometers; Current measurement; Dynamic range; Electrodes; Electrons; Fabrication; Paper technology; Tunneling; Voltage; Crab leg beam; Folded beam; High dynamic range; Low cross axis sensitivity and Tunneling accelerometer;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Semiconductor Technology, 2009. IEDST '09. 2nd International Workshop on
Conference_Location
Mumbai
Print_ISBN
978-1-4244-3831-0
Electronic_ISBN
978-1-4244-3832-7
Type
conf
DOI
10.1109/EDST.2009.5166120
Filename
5166120
Link To Document