Title :
Technical Digest. IEEE Solid-State Sensor and Actuator Workshop [Table of Contents]
Abstract :
Presents the table of contents from the conference proceedings.
Keywords :
accelerometers; actuators; biosensors; electric sensing devices; micromechanical devices; transducers; accelerometers; acoustic devices; biological sensors; chemistry; computer-aided design; fabrication methods; flow sensors; integrated sensor systems; magnetic sensors; microactuators; physics; pressure sensors; resonant devices;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
DOI :
10.1109/SOLSEN.1990.109855
