DocumentCode :
2559980
Title :
Real-time fault detection and condition monitoring system for chiller
Author :
Chang, Wen-Yao ; Wang, Tzu-Chi ; Shin, Yuan-Pin
Author_Institution :
Center for Environ., Safety & Health Technol. Dev., Ind. Technol. Res. Inst., Hsinchu
fYear :
2004
fDate :
10-10 Sept. 2004
Firstpage :
160
Lastpage :
165
Abstract :
Predictive maintenance and increase on equipment effectiveness could be carried out by the equipment condition monitoring system (ECMS). The designing procedures of ECMS from failure analysis, monitoring method, monitoring steps, to maintenance strategy are presented in this paper. The maintenance strategies could be divided into three kind of category and four level architectures. Six kinds of monitoring methods, such as chiller performance coefficient monitoring, element efficiency monitoring, performance monitoring, data limit monitoring, vibration monitoring and current signature monitoring, are also discussed in this paper
Keywords :
condition monitoring; cooling; fault diagnosis; preventive maintenance; production equipment; semiconductor device manufacture; chiller performance coefficient monitoring; current signature monitoring; data limit monitoring; element efficiency monitoring; equipment condition monitoring system; failure analysis; predictive maintenance; real-time fault detection; vibration monitoring; Artificial neural networks; Brushless DC motors; Condition monitoring; Equations; Failure analysis; Fault detection; Manufacturing processes; Real time systems; Semiconductor device manufacture; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Technology Workshop Proceedings, 2004
Conference_Location :
Hsinchu
Print_ISBN :
0-7803-8469-5
Type :
conf
DOI :
10.1109/SMTW.2004.1393755
Filename :
1393755
Link To Document :
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