Plasma diagnostics with high-time resolution based on floating harmonic method in pulsed plasma

To measure plasma parameters such as plasma density and electron temperature in pulsed plasma or rapidly changing plasma, a method in high time resolution of up to 100 μsec was proposed in this study. The basic principle for the measurement of the plasma parameters is to use the measured plasma current which contains fundamental current and its harmonic currents [1]. To obtain data with high time resolution, the measured currents were divided into small pieces of data in a unit time and each data were grouped and calculated. Then plasma parameters in each group were obtained. Finally, the method can measure plasma parameters in the range of μsec and the measured results were compared to conventional single Langmuir probe method.