118-dB dynamic range, continuous-time, opened-loop capactance to voltage converter readout for capacitive MEMS accelerometer

Author

Kevin, T.C.C. ; Han, Dong ; Ravinder, P.S. ; Duy, D.P. ; Chin, Y.P. ; Jian, W.L. ; Nuttman, David ; Je, Minkyu

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2010

fDate

8-10 Nov. 2010

Firstpage

1

Lastpage

4

Abstract

A high performance analog front-end (AFE) interface circuit for capacitive MEMS accelerometer is presented in this paper. The AFE was implemented in a continuous-time (CT), chopper stabilized, capacitance to voltage converter (CVC) topology with a variable gain amplifier (VGA) for greater flexibility and a low pass filter (LPF) which limited the signal bandwidth to 300 Hz. Noise analysis of each building block of the AFE is also presented in this paper. The measured input referred noise density is 27 nV/√Hz. Long term stability results showed that the input offset has an Allan deviation floor of 60 nV_rms. The nonlinearity for the AFE was measured at ± 1 %.

Keywords

accelerometers; amplifiers; capacitive sensors; convertors; detector circuits; low-pass filters; microsensors; readout electronics; analog front-end interface circuit; bandwidth 300 Hz; capacitive MEMS accelerometer; chopper stabilized circuit; continuous time capacitive accelerometer; dynamic range capacitive accelerometer; low pass filter; noise analysis; open loop capactance-to-voltage converter readout; variable gain amplifier; Accelerometers; Capacitive sensors; Choppers; Micromechanical devices; Noise; Resistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Circuits Conference (A-SSCC), 2010 IEEE Asian

Conference_Location

Beijing

Print_ISBN

978-1-4244-8300-6

Type

conf

DOI

10.1109/ASSCC.2010.5716626

Filename

5716626