Abstract :
The following topics are dealt with: junction technology; nanodevice; advanced integration; advanced doping; silicides; germanides; metrology; annealed defects.
Keywords :
annealing; integrated circuit technology; nanoelectronics; semiconductor doping; semiconductor materials; advanced integration; annealing; defects; doping; germanides; junction technology; metrology; nanodevice; silicides;
Conference_Titel :
Junction Technology, 2009. IWJT 2009. International Workshop on
Conference_Location :
Kyoto
Print_ISBN :
978-1-4244-3319-3
DOI :
10.1109/IWJT.2009.5166197
