DocumentCode
2561424
Title
[Title page]
fYear
2009
fDate
11-12 June 2009
Abstract
The following topics are dealt with: junction technology; nanodevice; advanced integration; advanced doping; silicides; germanides; metrology; annealed defects.
Keywords
annealing; integrated circuit technology; nanoelectronics; semiconductor doping; semiconductor materials; advanced integration; annealing; defects; doping; germanides; junction technology; metrology; nanodevice; silicides;
fLanguage
English
Publisher
ieee
Conference_Titel
Junction Technology, 2009. IWJT 2009. International Workshop on
Conference_Location
Kyoto
Print_ISBN
978-1-4244-3319-3
Type
conf
DOI
10.1109/IWJT.2009.5166197
Filename
5166197
Link To Document