Title :
New Semiconductor Structure Capacity Measurement Method using the Differential Amplifier
Author :
Zaycev, Nikolay G.
Author_Institution :
Tomsk State Univ. of Control of Syst. of Radioelectronic
Abstract :
A new method of measurement of capacity of semiconductor structures is presented.. The methodic design reasoning is shown. The developed method has some advantages over the balance schemes and schemes of capacity divisor. It has linear capacity-voltage relationship on the output of measuring circuit
Keywords :
MIS structures; capacitance measurement; differential amplifiers; operational amplifiers; semiconductor device measurement; MIS structures; capacity divisor; capacity measurement; linear capacity-voltage relationship; measuring circuit; operational differential amplifier; semiconductor structure; Circuit stability; Circuit testing; Differential amplifiers; Electrical resistance measurement; Frequency measurement; Operational amplifiers; Phase measurement; Shape measurement; Time measurement; Voltage; Operational differential amplifier; semiconductor structure´s capacity measurement;
Conference_Titel :
Electron Devices and Materials, 2006. Proceedings. 7th Annual 2006 International Workshop and Tutorials on
Conference_Location :
Erlagol, Altai
Print_ISBN :
5-7782-0646-1
DOI :
10.1109/SIBEDM.2006.231660
