DocumentCode
2561585
Title
The Method of Semiconductor Structure Impedance Measurement
Author
Zaycev, N.G.
Author_Institution
Tomsk State Univ. of Control of Syst. of Radioelectronic
fYear
2006
fDate
1-5 July 2006
Firstpage
315
Lastpage
318
Abstract
A semiconductor structure impedance measurement circuit calculation using the differencing circuit is presented. Also the developed method of measurement of phase difference by three-amplitude method is presented. These presented methods excel by their simplicity and performance
Keywords
MIS structures; differential amplifiers; electric impedance measurement; operational amplifiers; MIS structure; circuit calculation; differencing circuit; differentiating operational amplifier; phase difference measurement; semiconductor structure impedance measurement; three-amplitude method; Admittance measurement; Circuit testing; Frequency; Impedance measurement; Phase measurement; Semiconductor device measurement; Semiconductor device testing; Semiconductor devices; Shape; Voltage; differentiating operational amplifier; semiconductor structure impedance measurement; three-phase method;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2006. Proceedings. 7th Annual 2006 International Workshop and Tutorials on
Conference_Location
Erlagol, Altai
ISSN
1815-3712
Print_ISBN
5-7782-0646-1
Type
conf
DOI
10.1109/SIBEDM.2006.231661
Filename
1694115
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