Title :
Creation of the Database for Preliminary Calibration System
Author :
Korolyova, Alisa S. ; Pjankov, Evgeniy S.
Author_Institution :
Moscow Inst. of Electron. Eng.
Abstract :
Calibration of models is a necessary and integral process in modeling of IC manufacturing techniques. In this work the selection, research and analysis of information which is to be considered during the performance of modeling have been carried out and the technique of preliminary calibration is developed
Keywords :
calibration; database management systems; integrated circuit manufacture; integrated circuit modelling; secondary ion mass spectroscopy; IC manufacturing; SIMS; database creation; information analysis; information research; preliminary calibration system; secondary mass ion spectroscopy; Calibration; Databases; Doping; Information analysis; Integrated circuit modeling; Integrated circuit technology; Performance analysis; Semiconductor process modeling; Surface resistance; Virtual manufacturing; Calibration; SIMS; modeling;
Conference_Titel :
Electron Devices and Materials, 2006. Proceedings. 7th Annual 2006 International Workshop and Tutorials on
Conference_Location :
Erlagol, Altai
Print_ISBN :
5-7782-0646-1
DOI :
10.1109/SIBEDM.2006.231664
