Title :
Impacts of plasma fluctuation on nanoparticle growth in reactive plasmas
Author :
Shiratani, Masaharu ; Kamataki, Kunihiro ; Morita, Yasuhiko ; Koga, Kazunori ; Uchida, Giichirou ; Itagaki, Naho ; Seo, Hyunwoong
Author_Institution :
Kyushu Univ., Fukuoka, Japan
Abstract :
We are investigating interactions between plasmas and nano-interfaces.1 Our research aims to bring about an explosive development of fabrication technologies of nanomaterials and nanostructures. In the nanoscales there arise four distinctive features of interactions: 1)size effects of properties, 2)fluctuation dominant phenomena, 3)object size below interaction length, and 4) nanostructures of reactive space.
Keywords :
high-frequency discharges; nanofabrication; nanoparticles; plasma fluctuations; plasma materials processing; plasma-wall interactions; size effect; capacitively-coupled rf discharges; interaction length; nanoparticles; plasma fluctuation; reactive plasma; size effects; Explosives; Fabrication; Fluctuations; Nanoparticles; Plasmas; Process control;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383747
