Title :
Laser ablated millimeter wave metamaterial antenna
Author :
Bunea, Alina-Cristina ; Craciunoiu, Florea ; Zamfirescu, Marian ; Dabu, Razvan ; Sajin, Gheorghe
Author_Institution :
Nat. Inst. for R&D in Microtechnol. (IMT), Bucharest, Romania
Abstract :
This paper presents the design, fabrication and characterization of a zeroth order resonance Composite Right / Left-Handed (CRLH) coplanar waveguide (CPW) antenna on high resistivity silicon substrate, working at 38 GHz. The technological process consisted of a combination of classic photolithography and laser ablation. Laser microprocessing was chosen for the processing of 7 μm wide gaps in the Au/Cr metal layer. Experimental results show RL <; -38 dB / 38.82 GHz, the -3 dB beamwidth of the radiation lobe of approx. 17° (in the transversal plane) and a computed maximum gain of 1.75 dBi / 38.82 GHz.
Keywords :
chromium; coplanar waveguides; elemental semiconductors; gold; laser ablation; metamaterial antennas; millimetre wave antennas; millimetre wave materials; silicon; waveguide antennas; Au-Cr; CPW; Si; composite right/left-handed coplanar waveguide antenna; frequency 38 GHz; frequency 38.82 GHz; high resistivity substrate; laser ablated millimeter wave metamaterial antenna; laser ablation; laser microprocessing; metal layer; photolithography; size 7 mum; zeroth order resonance; Antenna measurements; Metamaterials; Microwave antennas; Microwave circuits; Microwave filters;
Conference_Titel :
Semiconductor Conference (CAS), 2011 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-61284-173-1
DOI :
10.1109/SMICND.2011.6095753
