Laser ablated millimeter wave metamaterial antenna

Author

Bunea, Alina-Cristina ; Craciunoiu, Florea ; Zamfirescu, Marian ; Dabu, Razvan ; Sajin, Gheorghe

Author_Institution

Nat. Inst. for R&D in Microtechnol. (IMT), Bucharest, Romania

Volume

1

fYear

2011

fDate

17-19 Oct. 2011

Firstpage

185

Lastpage

188

Abstract

This paper presents the design, fabrication and characterization of a zeroth order resonance Composite Right / Left-Handed (CRLH) coplanar waveguide (CPW) antenna on high resistivity silicon substrate, working at 38 GHz. The technological process consisted of a combination of classic photolithography and laser ablation. Laser microprocessing was chosen for the processing of 7 μm wide gaps in the Au/Cr metal layer. Experimental results show RL <; -38 dB / 38.82 GHz, the -3 dB beamwidth of the radiation lobe of approx. 17° (in the transversal plane) and a computed maximum gain of 1.75 dBi / 38.82 GHz.

Keywords

chromium; coplanar waveguides; elemental semiconductors; gold; laser ablation; metamaterial antennas; millimetre wave antennas; millimetre wave materials; silicon; waveguide antennas; Au-Cr; CPW; Si; composite right/left-handed coplanar waveguide antenna; frequency 38 GHz; frequency 38.82 GHz; high resistivity substrate; laser ablated millimeter wave metamaterial antenna; laser ablation; laser microprocessing; metal layer; photolithography; size 7 mum; zeroth order resonance; Antenna measurements; Metamaterials; Microwave antennas; Microwave circuits; Microwave filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2011 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-61284-173-1

Type

conf

DOI

10.1109/SMICND.2011.6095753

Filename

6095753