Experimental and theoretical investigation of technological process of obtaining of metals oxide and nitride coatings by using high-voltage gas-discharge electron beam evaporator

Author

Denbnovetsky, S.V. ; Melnyk, V.I. ; Melnyk, I.V. ; Porytskyy, P.V.

Author_Institution

Fac. of Electron., Kiev Polytech. Inst., Ukraine

Volume

2

fYear

2000

fDate

2000

Firstpage

552

Abstract

A method of deposition of metals oxide and nitride coatings using glow discharge electron guns is discussed. A scheme of technological equipment to realise this process is represented and assignment of its major details is described. Technological parameters of elaborated equipment is pointed out. A mathematical model of the realised technological process is proposed and obtained results of simulation is discussed and verified with experimental measurements

Keywords

coating techniques; coatings; electron beam deposition; electron guns; glow discharges; glow discharge electron guns; high-voltage gas-discharge electron beam evaporator; mathematical model; metals oxide deposition; nitride coatings deposition; technological parameters; technological process; Cathodes; Ceramics; Chemicals; Coatings; Electron beams; Electron guns; Gases; Glow discharges; Nuclear electronics; Surface discharges;

fLanguage

English

Publisher

ieee

Conference_Titel

Discharges and Electrical Insulation in Vacuum, 2000. Proceedings. ISDEIV. XIXth International Symposium on

Conference_Location

Xi´an

Print_ISBN

0-7803-5791-4

Type

conf

DOI

10.1109/DEIV.2000.879048

Filename

879048