DocumentCode :
2563202
Title :
An XYΘ actuator with a closed-loop magnetic field
Author :
Kato, Haruna ; Torii, Akihiro ; Ueda, Akiteru
Author_Institution :
Dept. of Electr. Eng., Aichi Inst. of Technol., Toyota, Japan
fYear :
1998
fDate :
25-28 Nov 1998
Firstpage :
83
Lastpage :
88
Abstract :
Precise positioning with multi degrees of freedom is needed in precision engineering. We formerly proposed two actuators that could move in X, Y and Θ directions by expansion of piezoelectric actuators and by adhesion of electromagnetic actuators. One was a Y-type actuator, and the other was a Δ-type actuator. These actuators were used on a magnetic floor. The 100 nm resolution of the linear displacement and the 500 nrad resolution of the angular displacement were obtained by these actuators. However, we could not obtain the same result on a slope. The magnetic force generated by the electromagnetic actuator was so small that the electromagnetic force could not hold the actuator on the slope. This was why a small gap between the yoke of the electromagnetic actuator and the magnetic floor reduced the electromagnetic force. In this paper we will revise configurations of the proposed actuators. A closed-loop magnetic field, which passes through the actuator and the magnetic floor, makes the electromagnetic force larger and the actuators can be driven on a slope and a wall. A sequence of the revised actuator is more complicated than that of the previous one, because two electromagnetic actuators must adhere to the floor. Since the electromagnetic force generated by the revised actuator is larger than that of the previous one, the revised actuators will be able to move on a wall
Keywords :
electromagnetic actuators; piezoelectric actuators; position control; Δ-type actuator; XYΘ actuator; Y-type actuator; actuator slip; angular displacement; closed-loop magnetic field; electromagnetic actuators; electromagnetic force; forward motion; linear displacement; magnetic floor; multi degrees of freedom; piezoelectric actuators; precise positioning; rotational motion; wall moving actuators; Coils; Electromagnetic fields; Electromagnetic forces; Hydraulic actuators; Leg; Magnetic field measurement; Magnetic fields; Magnetic forces; Piezoelectric actuators; Surface resistance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-5130-4
Type :
conf
DOI :
10.1109/MHS.1998.745755
Filename :
745755
Link To Document :
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