DocumentCode
2563369
Title
The sheath around biased objects immersed in streaming vacuum arc plasmas
Author
Anders, André
Author_Institution
Lawrence Berkeley Lab., CA, USA
Volume
2
fYear
2000
fDate
2000
Firstpage
594
Abstract
Sheaths around negatively biased substrates immersed in vacuum arc plasmas were investigated using positively biased probes. Due to the high plasma density and velocity, the sheath is very thin at the upstream side of the substrate. Its thickness scales approximately with 1 mm/kV for the conditions investigated but the data can also be fitted with the theoretical (bias voltage)4/3 law. The sheath very quickly reaches (<3 μs) its average quasi-stationary position. The actual position of the sheath edge is subject to fast fluctuations which are correlated with fluctuations of the plasma density. There is evidence that no presheath exists on the upstream side because the Bohm condition is oversatisfied
Keywords
ion implantation; plasma density; plasma deposition; plasma probes; plasma sheaths; substrates; vacuum arcs; Bohm condition; high plasma density; high plasma velocity; negatively biased substrates; plasma immersion ion implantation; plasma sheath; positively biased probes; quasi-stationary position; sheath edge position; streaming vacuum arc plasmas; thickness; Cathodes; Filters; Magnetic separation; Plasma density; Plasma immersion ion implantation; Plasma measurements; Plasma sheaths; Probes; Vacuum arcs; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 2000. Proceedings. ISDEIV. XIXth International Symposium on
Conference_Location
Xi´an
Print_ISBN
0-7803-5791-4
Type
conf
DOI
10.1109/DEIV.2000.879059
Filename
879059
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