• DocumentCode
    2563369
  • Title

    The sheath around biased objects immersed in streaming vacuum arc plasmas

  • Author

    Anders, André

  • Author_Institution
    Lawrence Berkeley Lab., CA, USA
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    594
  • Abstract
    Sheaths around negatively biased substrates immersed in vacuum arc plasmas were investigated using positively biased probes. Due to the high plasma density and velocity, the sheath is very thin at the upstream side of the substrate. Its thickness scales approximately with 1 mm/kV for the conditions investigated but the data can also be fitted with the theoretical (bias voltage)4/3 law. The sheath very quickly reaches (<3 μs) its average quasi-stationary position. The actual position of the sheath edge is subject to fast fluctuations which are correlated with fluctuations of the plasma density. There is evidence that no presheath exists on the upstream side because the Bohm condition is oversatisfied
  • Keywords
    ion implantation; plasma density; plasma deposition; plasma probes; plasma sheaths; substrates; vacuum arcs; Bohm condition; high plasma density; high plasma velocity; negatively biased substrates; plasma immersion ion implantation; plasma sheath; positively biased probes; quasi-stationary position; sheath edge position; streaming vacuum arc plasmas; thickness; Cathodes; Filters; Magnetic separation; Plasma density; Plasma immersion ion implantation; Plasma measurements; Plasma sheaths; Probes; Vacuum arcs; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Discharges and Electrical Insulation in Vacuum, 2000. Proceedings. ISDEIV. XIXth International Symposium on
  • Conference_Location
    Xi´an
  • Print_ISBN
    0-7803-5791-4
  • Type

    conf

  • DOI
    10.1109/DEIV.2000.879059
  • Filename
    879059