DocumentCode
2563504
Title
A new micro SMA thin film actuator prestrained by polyimide
Author
Kuribayashi, Katsutoshi ; Fujii, Tatsuya
Author_Institution
Dept. of Mech. Eng., Yamaguchi Univ., Ube, Japan
fYear
1998
fDate
25-28 Nov 1998
Firstpage
165
Lastpage
170
Abstract
Micro SMA (shape memory alloy) thin film is a good material for a microactuator of a micromachine on silicone wafer, because of it merits: i) low driving voltage, ii) big force per volume and weight, iii) faster response compared to bulk SMA actuator. However there is a problem in fabricating micro SMA thin film actuator on silicone wafer; that is, how to prestrain automatically. We propose to use polyimide that shrinks to about one-half of the original size following heat treatment as a material to prestrain SMA thin films. Trial productions of bending type SMA thin film actuators were made. This actuator curls at room temperature and becomes straight at a high temperature of about 80°C
Keywords
microactuators; shape memory effects; 80 degC; bending type; driving voltage; micro SMA thin film actuator; micromachine; response; Actuators; Heat treatment; Low voltage; Microactuators; Polyimides; Production; Semiconductor thin films; Shape memory alloys; Temperature; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on
Conference_Location
Nagoya
Print_ISBN
0-7803-5130-4
Type
conf
DOI
10.1109/MHS.1998.745775
Filename
745775
Link To Document