Title :
Tunable acoustic absorber with micro deep hole array
Author :
Yoda, Mitsuhiro ; Sugiyama, Susumu ; Akishita, Sadao ; Konishi, Satoshi
Author_Institution :
Fac. of Sci. & Eng., Ritsumeikan Univ., Kyoto, Japan
Abstract :
We present a tunable acoustic absorbing system. Most of the conventional acoustic absorbers can absorb an only sound of a fixed frequency. We propose an acoustic absorbing system with a tunable compliance in order to absorb variable sounds. The developed system forms an array of Helmholtz resonators with a deep hole array by a X-ray lithography. Micro deep holes are effective at low frequency. The resonator has an air cavity whose volume is controllable so as to tune its resonant frequency to a desired frequency. This paper reports the characteristics of our developed acoustic absorbing system and our project status
Keywords :
X-ray lithography; acoustic arrays; acoustic materials; acoustic resonators; acoustic wave absorption; electrostatic actuators; microactuators; tuning; Helmholtz resonator array; X-ray lithography; air cavity; micro deep hole array; microactuator design; resonant frequency tuning; tunable acoustic absorber; tunable compliance; variable sounds absorption; Absorption; Acoustic arrays; Acoustic devices; Capacitance; Electric resistance; Equations; Immune system; Neck; Resonant frequency; Tunable circuits and devices;
Conference_Titel :
Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-5130-4
DOI :
10.1109/MHS.1998.745778