Finite element modeling of PSAW devices

Author

Maouhoub, Sara ; Aoura, Youssef ; El Fahime, Benaissa ; Radouani, Mohammed ; Mir, Amna

Author_Institution

Dept. of Phys., My Ismail Univ., Meknes, Morocco

fYear

2014

fDate

14-16 April 2014

Firstpage

1579

Lastpage

1583

Abstract

Finite element method (FEM) is used to simulate and investigate the surface acoustic wave (SAW) devices using aluminum for the transducers and 41° rotated Y-cut Lithium Niobate (Y+41 LiNbO₃) for the substrate. For accuracy in the evaluation of modeling with a FEM, fundamental design parameters of a resonator, like surface velocity, electromechanical coupling coefficient and reflectivity is computed and compared to literature and experimental results. The effects of mass load of IDT, number of IDT and depth of substrate on the performance of SAW device are investigated. The results showed that the metallization ratio and electrode height have a significant effect on resonance frequency and SAW phase velocity.

Keywords

aluminium; finite element analysis; interdigital transducers; metallisation; surface acoustic wave resonators; surface acoustic wave transducers; Al; FEM; IDT; LiNbO₃; PSAW device; SAW phase velocity; electrode; electromechanical coupling coefficient; finite element modeling; metallization ratio; resonator; rotated V-cut lithium niobate; surface acoustic wave device; surface velocity; transducer; Optimization; Performance evaluation; Resonant frequency; Surface acoustic waves; FEM; Perfectly Matched Layer; SAW devices; Y+41 LiNbO3 subtract;

fLanguage

English

Publisher

ieee

Conference_Titel

Multimedia Computing and Systems (ICMCS), 2014 International Conference on

Conference_Location

Marrakech

Print_ISBN

978-1-4799-3823-0

Type

conf

DOI

10.1109/ICMCS.2014.6911293

Filename

6911293