The distribution of the temperature pattern and stress field on metallic details under the effect of electron, ion and plasma fluxes

The distribution of temperature pattern and stress field on molybdenum and aluminum targets under the effect of plasma with different intensity and energy is discussed. The effect of plasma fluxes (charged particles) on metal involves the disturbance of target atoms due to collision processes and heat conductivity, which causes thermal vibrations of atoms. The following situations are taken into account: thermal effect regions of adjacent particles do not overlap even at large-angle scattering; thermal effect regions can overlap at large-angle scattering, but, cannot overlap at small-angle scattering; and thermal effect regions overlap even at small-angle scattering