• DocumentCode
    2563792
  • Title

    Study of the spatial coherence of the VUV Xe/sup 2+/ Auger laser by holographic imaging

  • Author

    Tóth, Cs ; Ferincz, I. ; Young, J.F.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Rice Univ., Houston, TX, USA
  • Volume
    2
  • fYear
    1996
  • fDate
    18-21 Nov. 1996
  • Firstpage
    304
  • Abstract
    On-axis holographic images of various test objects were used to characterize the spatial coherence properties of the Xe/sup 2+/ Auger laser emitting at /spl lambda/=109 nm. The reliable performance of the VUV imaging system consisting of PMMA (polymethylmethacrylate) film as a photosensitive material and the AFM (atomic force microscope) as a read-out device has been demonstrated.
  • Keywords
    Auger effect; X-ray lasers; atomic force microscopy; holography; ion lasers; laser beams; laser transitions; laser variables measurement; light coherence; xenon; 109 nm; AFM; PMMA film; VUV Xe/sup 2+/ Auger laser; VUV imaging system; Xe; atomic force microscope; holographic imaging; on-axis holographic images; photosensitive material; polymethylmethacrylate; read-out device; reliable performance; spatial coherence; test objects; Apertures; Atomic force microscopy; Focusing; Holography; Laser beams; Optical films; Resists; Spatial coherence; Surface emitting lasers; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1996. LEOS 96., IEEE
  • Conference_Location
    Boston, MA, USA
  • Print_ISBN
    0-7803-3160-5
  • Type

    conf

  • DOI
    10.1109/LEOS.1996.571695
  • Filename
    571695
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2563792