Title :
Study of the spatial coherence of the VUV Xe/sup 2+/ Auger laser by holographic imaging
Author :
Tóth, Cs ; Ferincz, I. ; Young, J.F.
Author_Institution :
Dept. of Electr. & Comput. Eng., Rice Univ., Houston, TX, USA
Abstract :
On-axis holographic images of various test objects were used to characterize the spatial coherence properties of the Xe/sup 2+/ Auger laser emitting at /spl lambda/=109 nm. The reliable performance of the VUV imaging system consisting of PMMA (polymethylmethacrylate) film as a photosensitive material and the AFM (atomic force microscope) as a read-out device has been demonstrated.
Keywords :
Auger effect; X-ray lasers; atomic force microscopy; holography; ion lasers; laser beams; laser transitions; laser variables measurement; light coherence; xenon; 109 nm; AFM; PMMA film; VUV Xe/sup 2+/ Auger laser; VUV imaging system; Xe; atomic force microscope; holographic imaging; on-axis holographic images; photosensitive material; polymethylmethacrylate; read-out device; reliable performance; spatial coherence; test objects; Apertures; Atomic force microscopy; Focusing; Holography; Laser beams; Optical films; Resists; Spatial coherence; Surface emitting lasers; Testing;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1996. LEOS 96., IEEE
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-3160-5
DOI :
10.1109/LEOS.1996.571695
