Title :
Characterization of two atmospheric pressure plasma sources on optical emission spectrum
Author :
Yang, Songping ; Tang, Ju
Author_Institution :
Alabama A&M Univ., Normal, AL, USA
Abstract :
Summary form only given. Two atmospheric-pressure plasma sources were generated. One was a helium plasma generated by RF discharge, and the other was an air plasma generated by dielectric barrier discharge (DBD). Both plasmas were used to modify polyethyleneterephthalate (PET) surfaces with extremely high throughputs. Both plasma sources were carefully characterized on optical emission spectrum (OES) from 300 to 800 nm. The main peaks in the emission spectrum were identified for both plasmas. For the RF helium plasma, emission spectrum changed with oxygen flow rate when oxygen was added as a minority gas. Small air leaks into the main helium flow could be found by monitoring the emission spectrum. In the air plasma emission spectrum, only N2 peaks showed up. The height of the 317 nm peak could be used to monitor the air plasma intensity.
Keywords :
helium; high-frequency discharges; luminescence; plasma diagnostics; plasma materials processing; plasma sources; plasma-wall interactions; polymers; He; RF discharge; RF helium plasma; air leaks; air plasma emission spectrum; air plasma intensity; dielectric barrier discharge; helium flow; minority gas; nitrogen peaks; optical emission spectrum; oxygen flow rate; peak height; plasma source characterization; polyethyleneterephthalate surfaces; pressure 1 atm; wavelength 300 nm to 800 nm; Discharges (electric); Educational institutions; Helium; Plasma sources; Radio frequency; Stimulated emission;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383875
