Kinetic effects in low pressure capacitively coupled plasmas

Summary form only given. We present results of particle-in-cell/Monte Carlo collision simulations of kinetic effects in low pressure capacitively coupled plasma discharge. We examine Ar discharges in the pressure range of 10s of mT and the frequency range of 10s of MHz. We track the formation of high energy electrons (e.g., at the ionization threshold or greater) as a marker for enhanced ionization. We show results for 2D and 3D simulations where we include magnetic field effects. We also show results including a realistic external circuit model. Finally, we show results of some novel numerical techniques, including initializing the plasma in an analytic approximation of steady-state.