Combination of modeling and simple real-time measurements to control plasma-surface interaction processes

The increasing complexity in industrial plasma processing demands new strategies for process control and monitoring. The energy transport mechanisms in the interface region between non-thermal low-pressure plasma and surface are of particular importance. Measurements of the “in situ” surface condition, which strongly affects the plasma-surface interaction processes, are extremely challenging. The most promising approach for advanced process monitoring is the active coupling of semi-kinetic simulations and diagnostics.