Design and fabrication of micromechanical logic elements

Author

Bergstrom, P. ; Tamagawa, T. ; Polla, D.

Author_Institution

Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA

fYear

1990

fDate

11-14 Feb 1990

Firstpage

15

Lastpage

20

Abstract

The development of a complete micromechanical digital logic family fabricated for use in low speed applications requiring radiation immunity is presented. The micromachined devices operate by electronic linear actuation of a slider element restricted to a one-dimensional track. A novel feature of the device is the use of a sliding electrical contact. The basic structure of the device is fabricated using three LPCVD polysilicon and two sacrificial oxide deposition steps. The micromechanical logic element demonstrates robust electrical characteristics and has an operating threshold of apparently 15 volts

Keywords

chemical vapour deposition; logic design; logic devices; 15 V; LPCVD; digital logic family; electrical characteristics; electronic linear actuation; micromachined devices; micromechanical logic elements; one-dimensional track; operating threshold; polysilicon; radiation immunity; sacrificial oxide deposition; slider element; sliding electrical contact; Circuits; Contacts; Electrodes; Electrostatics; Fabrication; Geometry; Inverters; Logic design; Logic devices; Micromechanical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Conference_Location

Napa Valley, CA

Type

conf

DOI

10.1109/MEMSYS.1990.110239

Filename

110239