• DocumentCode
    256677
  • Title

    Diameter Detection for Crystals Growth Based on Image Processing

  • Author

    Yumei Sun ; Hongxiu Li

  • Author_Institution
    Dept. of Electron. & Inf. Eng., Yan´tai Nanshan Univ., Yan´tai, China
  • Volume
    2
  • fYear
    2014
  • fDate
    26-27 Aug. 2014
  • Firstpage
    64
  • Lastpage
    66
  • Abstract
    According the diameter measurement of single crystal silicon in the growth process to put forward a diameter detection method that a circle defined by three points not in the same straight line. First, pretreat the growth image of single crystal silicon. Then, according the algorithm that a circle defined by three points not in the same straight line to extract the feature points, and the diameter pixel value of single crystal silicon accuratly detected. Finally transformed diameter pixel value into length value of the monocrystalline silicon rod through the measurement of diameter pixel value of draft tube. Tests show that error is very small between the test results and the true value, and meet the system requirements in a certain precision.
  • Keywords
    crystal growth; image processing; semiconductor technology; crystals growth; diameter detection; diameter measurement; diameter pixel value; draft tube; image processing; monocrystalline silicon rod; single crystal silicon; Apertures; Crystals; Electron tubes; Feature extraction; Image edge detection; Semiconductor device measurement; Silicon; VC++; diameter measurement; extract feature points; image processing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Human-Machine Systems and Cybernetics (IHMSC), 2014 Sixth International Conference on
  • Conference_Location
    Hangzhou
  • Print_ISBN
    978-1-4799-4956-4
  • Type

    conf

  • DOI
    10.1109/IHMSC.2014.118
  • Filename
    6911449