Title :
Diameter Detection for Crystals Growth Based on Image Processing
Author :
Yumei Sun ; Hongxiu Li
Author_Institution :
Dept. of Electron. & Inf. Eng., Yan´tai Nanshan Univ., Yan´tai, China
Abstract :
According the diameter measurement of single crystal silicon in the growth process to put forward a diameter detection method that a circle defined by three points not in the same straight line. First, pretreat the growth image of single crystal silicon. Then, according the algorithm that a circle defined by three points not in the same straight line to extract the feature points, and the diameter pixel value of single crystal silicon accuratly detected. Finally transformed diameter pixel value into length value of the monocrystalline silicon rod through the measurement of diameter pixel value of draft tube. Tests show that error is very small between the test results and the true value, and meet the system requirements in a certain precision.
Keywords :
crystal growth; image processing; semiconductor technology; crystals growth; diameter detection; diameter measurement; diameter pixel value; draft tube; image processing; monocrystalline silicon rod; single crystal silicon; Apertures; Crystals; Electron tubes; Feature extraction; Image edge detection; Semiconductor device measurement; Silicon; VC++; diameter measurement; extract feature points; image processing;
Conference_Titel :
Intelligent Human-Machine Systems and Cybernetics (IHMSC), 2014 Sixth International Conference on
Conference_Location :
Hangzhou
Print_ISBN :
978-1-4799-4956-4
DOI :
10.1109/IHMSC.2014.118