CAEMEMS: an integrated computer-aided engineering workbench for micro-electro-mechanical systems

A summary of a proposed computer-aided engineering system for micro-electro-mechanical systems is presented. The system will take advantage of existing high-level integrated mechanical engineering software tools and add application-specific software for the system to function as a MEMS-specific designers´ workbench environment. The system, called CAEMEMS, will include database structures (MEMS Databases); a process modeler that can model MEMS-relevant process sequences (MEMS CAD); and a device modeler that can perform finite-element simulations, link individual devices together through appropriate matrix operations, and perform simulations of entire mechanical systems (MEMS Sim)