Title :
Magnetic levitation-based micro-automation of mechanical processes in semiconductor fabrication
Author :
Busch-Vishniac, Ilene ; Chen, Shiaw-Jong ; Jeong, Myung-Chan ; Li, Shih-Hung ; Wang, Ing-Yann
Author_Institution :
Dept. of Mech. Eng., Texas Univ., Austin, TX, USA
Abstract :
Micro-automation systems that operate through magnetic levitation of a micromanipulator are discussed. Applications of such systems include positioning, probing, and quality control tasks. Tools used in the design of magnetic levitation-based micro-automation systems and results obtained from demonstration systems are given. A review of work in progress is included
Keywords :
industrial robots; magnetic levitation; manufacturing computer control; semiconductor device manufacture; magnetic levitation; mechanical processes; micro-automation systems; micromanipulator; positioning; probing; quality control; semiconductor fabrication; Actuators; Electrostatics; Fabrication; Friction; Large-scale systems; Magnetic levitation; Magnetic semiconductors; Manufacturing automation; Payloads; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110266
