T5 What makes Moore’s law continue? — Recent advances in semiconductor

Summary form only given. Many people wandered whether Moore´s law could continue at 90 nm and beyond about 4 years ago. Apparently, we have survived, and Moore´s law has continued, and is still continuing. In this tutorial, it will explore what has made Moore´s law continued, and what is making Moore´s law continuing. The tutorial will first review issues and challenges in semiconductor, the crisis of lithography and of power. It then discusses solutions and workarounds in detail that make Moore´s law continue. They include RET, OPC, PSM, EUV, multi-core, MTCMOS, clock gating, multi-Vt, voltage island, power gating, strain silicon, SOI, high-k and metal gate and other advanced silicon innovations.