Title :
Reversible SMA actuator for micron sized robot
Author :
Kuribayashi, Katsutoshi ; Yoshitake, Masaaki ; Ogawa, Soichi
Author_Institution :
Dept. of Mech. Eng., Osaka Univ., Sakai, Japan
Abstract :
A micron-sized robot using reversible shape-memory alloys (RSMA) is proposed. A larger active bending frame using larger-sized RSMA is analyzed and its homogeneous transformation matrix is derived. A SCARA robot using two larger-sized RSMAs was made and controlled by electrical current. It is shown that thin film of reversible TiNi alloy for a micron-sized robot could be made by a magnetron sputtering method and by heat treatment methods, and that the frequency response of 10-μm-thick thin film of reversible TiNi alloy is about 5 Hz
Keywords :
electric actuators; heat treatment; nickel alloys; robots; shape memory effects; sputtered coatings; titanium alloys; 10 micron; SCARA robot; SMA actuator; TiNi; active bending frame; frequency response; heat treatment; homogeneous transformation matrix; magnetron sputtering; micron-sized robot; reversible shape-memory alloys; Actuators; Educational institutions; Magnetic materials; Mechanical engineering; Service robots; Shape memory alloys; Springs; Sputtering; Temperature distribution; Textile industry;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110279
