Reversible SMA actuator for micron sized robot

Author

Kuribayashi, Katsutoshi ; Yoshitake, Masaaki ; Ogawa, Soichi

Author_Institution

Dept. of Mech. Eng., Osaka Univ., Sakai, Japan

fYear

1990

fDate

11-14 Feb 1990

Firstpage

217

Lastpage

221

Abstract

A micron-sized robot using reversible shape-memory alloys (RSMA) is proposed. A larger active bending frame using larger-sized RSMA is analyzed and its homogeneous transformation matrix is derived. A SCARA robot using two larger-sized RSMAs was made and controlled by electrical current. It is shown that thin film of reversible TiNi alloy for a micron-sized robot could be made by a magnetron sputtering method and by heat treatment methods, and that the frequency response of 10-μm-thick thin film of reversible TiNi alloy is about 5 Hz

Keywords

electric actuators; heat treatment; nickel alloys; robots; shape memory effects; sputtered coatings; titanium alloys; 10 micron; SCARA robot; SMA actuator; TiNi; active bending frame; frequency response; heat treatment; homogeneous transformation matrix; magnetron sputtering; micron-sized robot; reversible shape-memory alloys; Actuators; Educational institutions; Magnetic materials; Mechanical engineering; Service robots; Shape memory alloys; Springs; Sputtering; Temperature distribution; Textile industry;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Conference_Location

Napa Valley, CA

Type

conf

DOI

10.1109/MEMSYS.1990.110279

Filename

110279