Title :
Precise positioning mechanism utilizing rapid deformations of piezoelectric elements
Author :
Higuchi, T. ; Yamagata, Y. ; Furutani, K. ; Kudoh, K.
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
A driving method suitable for a micro mechanism is introduced. It utilizes friction and inertial force caused by rapid deformations of piezoelectric elements. A one-dimensional linear positioner using this mechanism consists of one main object put on a guiding surface, a piezo, and a weight. The weight is connected to one end of the main object via the piezo. By controlling rapid extension or contraction of the piezo, it can make step-like movements of several nanometers up to ten micrometers bidirectionally against friction. By repeating this step movement, it can move for a long distance. Using this mechanism, two types of joints for micro robot arm are developed. One is a simple rotating joint with an arm of 5 cm, and the other is a three-degree-of-freedom (DOF) joint with an 8 cm arm. Minimum step movements of the two joints were smaller than 0.1 μm and maximum velocities were larger than 2 mm/sec at the end of the arm. Combining two joints, a four-DOF micro robot arm was developed
Keywords :
piezoelectric devices; position control; robots; driving method; friction; guiding surface; inertial force; maximum velocities; micro robot arm; one-dimensional linear positioner; piezoelectric elements; positioning mechanism; rapid deformations; rotating joint; step-like movements; three-degree-of-freedom; Acceleration; Actuators; Bidirectional control; Friction; Robotics and automation; Rough surfaces; Service robots; Surface roughness; Vacuum systems; Voltage control;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110280
