DocumentCode
2567243
Title
Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4)
fYear
1990
fDate
11-14 Feb. 1990
Abstract
The following topics are dealt with: multiple-mode micromechanical resonators; design of micromechanical logic elements; room temperature, open loop levitation of microdevices using diamagnetic materials; a CAD architecture for micromechanical systems; a robotics and micromechanics; ferroelectric thin films; bulk and surface micromachining of GaAs structures; micromachined microvalves and micropumps; electrostatic structures; imaging with the tunneling and force microscopes; and microsized robots. Abstracts of individual papers can be found under the relevant classification codes in this or other issues
Keywords
CAD; actuators; logic devices; magnetic levitation; pumps; resonators; robots; surface treatment; valves; CAD; diamagnetic materials; electrostatic structures; ferroelectric thin films; force microscopes; micromachining; micromechanical logic elements; micropumps; microsized robots; microvalves; multiple-mode micromechanical resonators; open loop levitation; robotics; tunnelling microscopes;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location
Napa Valley, CA, USA
Type
conf
DOI
10.1109/MEMSYS.1990.110281
Filename
110281
Link To Document