Title :
Nonlinear State Estimation with Unscented Kalman Filter in Czochralski Process
Author :
Zhaohui Qiao ; Hongxin Li ; Yancun Leng ; Pu Wang
Author_Institution :
Sch. of Inf. Sci. & Eng., Lanzhou Univ., Lanzhou, China
Abstract :
Unscented Transformation (UT) has an excellent performance in nonlinear systems, this paper will analyze and implement the UKF in the Czochralski crystal growth process to figure out its nonlinearity, thus increasing the accuracy of state estimation in crystal diameter control. Some derivative UKF forms are also introduced in this paper. In addition, through comparison estimation results of different UKF forms, the principle of the sigma points selection are presented.
Keywords :
Kalman filters; crystal growth from melt; nonlinear filters; state estimation; Czochralski crystal growth process; UKF; UT; nonlinear state estimation; unscented Kalman filter; unscented transformation; Crystals; Kalman filters; Noise measurement; Process control; Silicon; State estimation; Diameter control in Cz process; Nonlinear state estimation; UKF; UT;
Conference_Titel :
Intelligent Human-Machine Systems and Cybernetics (IHMSC), 2014 Sixth International Conference on
Conference_Location :
Hangzhou
Print_ISBN :
978-1-4799-4956-4
DOI :
10.1109/IHMSC.2014.172
