DocumentCode
256782
Title
Nonlinear State Estimation with Unscented Kalman Filter in Czochralski Process
Author
Zhaohui Qiao ; Hongxin Li ; Yancun Leng ; Pu Wang
Author_Institution
Sch. of Inf. Sci. & Eng., Lanzhou Univ., Lanzhou, China
Volume
2
fYear
2014
fDate
26-27 Aug. 2014
Firstpage
292
Lastpage
296
Abstract
Unscented Transformation (UT) has an excellent performance in nonlinear systems, this paper will analyze and implement the UKF in the Czochralski crystal growth process to figure out its nonlinearity, thus increasing the accuracy of state estimation in crystal diameter control. Some derivative UKF forms are also introduced in this paper. In addition, through comparison estimation results of different UKF forms, the principle of the sigma points selection are presented.
Keywords
Kalman filters; crystal growth from melt; nonlinear filters; state estimation; Czochralski crystal growth process; UKF; UT; nonlinear state estimation; unscented Kalman filter; unscented transformation; Crystals; Kalman filters; Noise measurement; Process control; Silicon; State estimation; Diameter control in Cz process; Nonlinear state estimation; UKF; UT;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Human-Machine Systems and Cybernetics (IHMSC), 2014 Sixth International Conference on
Conference_Location
Hangzhou
Print_ISBN
978-1-4799-4956-4
Type
conf
DOI
10.1109/IHMSC.2014.172
Filename
6911503
Link To Document